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MKS 1159B-00100RV-SPCAL Mass Flow Controller - Used
59294-60158
Used
1159B-00100RV-SPCAL
2 Items
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MKS 1159B-00100RV-SPCAL Mass Flow Controller - Used
PN: 1159B-00100RV-SPCAL
1159B00100RVSPCAL
Mass Flow Controller
Calibration Referenced To 0°C And 760 TORR.
Pin Signal
1 MKS Test Point*
2 Flow Signal Output
3 Valve Close*
4 Valve Open*
5 Power Common
6 -15 VDC
7 +15 VDC
8 Set Point Input*
9 No Connection
10 Optional Input*
11 Signal Common
12 Signal Common
13 No Connection
14 No Connection
15 Chassis Ground
*Controller Only
15 Pin Male
PN: 1159B-00100RV-SPCAL
1159B00100RVSPCAL
| Gas: | H2 |
| Range: | 100 SCCM |
| Thread: | 1/4" |
Mass Flow Controller
Calibration Referenced To 0°C And 760 TORR.
Pin Signal
1 MKS Test Point*
2 Flow Signal Output
3 Valve Close*
4 Valve Open*
5 Power Common
6 -15 VDC
7 +15 VDC
8 Set Point Input*
9 No Connection
10 Optional Input*
11 Signal Common
12 Signal Common
13 No Connection
14 No Connection
15 Chassis Ground
*Controller Only
15 Pin Male